However, a conventional spectroscopic ellipsometer, as shown in Fig.1a, typically modulates the polarization state via mechanical rotation of the compensator or analyzer. For spectral detection ...

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X-ray metrology involves different tool types. One OCD tool type is called an ellipsometer. Used in the industry for years, the ellipsometer utilizes polarized light to characterize structures.

This includes three dry etchers with a range of capabilities, while characterization tools include an ellipsometer, FTIR, and wafer curvature system. This room also has the following resources: The ...

Dissertation/Thesis Title: Design of a Submillimeter Ellipsometer and Application to the Measurement of Complex Indices of Refraction of Materials BS: Physics, (1979), University of Lowell - Lowell, ...

Dissertation/Thesis Title: Design of a Submillimeter Ellipsometer and Application to the Measurement of Complex Indices of Refraction of Materials BS: Physics, (1979), University of Lowell - Lowell, ...

As stated, CD-SEMs take top-down images. It also requires an OCD tool called a spectroscopic ellipsometer. This tool is used in conjunction with a measurement technique called scatterometry. A ...

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However, a conventional spectroscopic ellipsometer, typically modulates the polarization state via mechanical rotation of the compensator or analyzer. For spectral detection, it either requires ...