The Ford Motor Company experimented in the 1980s with micromachined nozzles for engine fuel injection. With the expiration of most key patents on nozzle formation, micromachined nozzles are becoming ...

In a study researchers from the Delft University of Technology announced the development of a novel surface micromachined accelerometer. This innovative device leverages a silicon carbide-carbon ...

In 1964, Harvey Nathanson from Westinghouse developed the first batch fabricated surface micromachined MEMS device, called the resonant gate transistor In the mid-1990's, MEMS emerged in industrial ...

More information: Jiarui Mo et al, A high aspect ratio surface micromachined accelerometer based on a SiC-CNT composite ...

The complete IMMR Website can be found here. 1. Sub-Nanogram Mass Measurement in Liquid A new micromachined mass measurement tool can now detect changes of less than 0.5 nanogram (half a billionth of ...

Researchers from Delft University of Technology have announced the development of a novel surface micromachined accelerometer. This innovative device utilizes a silicon carbide-carbon nanotube ...

M. Kanygin, A.P. Joy, and B. Bahreyni, “Localized mechanical actuation using pn junctions”, Nature Scientific Reports, vol. 9:14885, no. 1, pp. 1–9, Oct. 2019 ...

Yamane, Daisuke Sun, Winston Kawasaki, Shigeo Fujita, Hiroyuki and Toshiyoshi, Hiroshi 2010. A 12GHz bulk-micromachined RF-MEMS phase shifter by SOI layer-separation ...